Bio Nano/Micro Electro-Mechanical Systems   [Archived Catalog]
2018-2019 Undergraduate Studies Bulletin
   
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EMCH 567 - Bio Nano/Micro Electro-Mechanical Systems

Credits: 3

Nano/microfabrication for nano/microstructures, photolithography, self-assembly, etching techniques, physical and chemical vapor deposition, surface and bulk micromachining, MEMS inegration and packaging; applications in Biomedical Engineering; microactuators, biomicrosensors, and biomedical devices.

Prerequisites: CHEM 112/L or CHEM 142, PHYS 212



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