Microelectromechanical Systems (MEMS)   [Archived Catalog]
2018-2019 Graduate Studies Bulletin
   
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EMCH 767 - Microelectromechanical Systems (MEMS)

Credits: 3

Fundamentals of micromachining and microfabrication technologies, microsystem design, MEMS integration and packaging issues, design and analysis of microsensors and microactuators, microfluidics and bioMEMS, and CAD for MEMS. Design project required.



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